Browsing by Author "Žukauskaitė, Agnė"

Now showing items 1-1 of 1

Title: Stability and residual stresses of sputtered wurtzite AlScN thin films Author(s): Österlund, Elmeri; Ross, Glenn; Caro, Miguel A.; Paulasto-Kröckel, Mervi; Hollmann, Andreas; Klaus, Manuela; Meixner, Matthias; Genzel, Christoph; Koppinen, Panu; Pensala, Tuomas; Žukauskaitė, Agnė; Trebala, Michal Date: 2021-03-02 Series: Physical Review Materials, Volume 5, issue 3