Browsing by Keyword "B implantation"

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Title: He implantation to control B diffusion in crystalline and preamorphized Si Author(s): Bruno, Elena; Mirabella, Salvo; Priolo, Francesco; Kuitunen, Katja; Tuomisto, Filip; Slotte, Jonatan; Giannazzo, Filippo; Bongiorno, Corrado; Raineri, Vito; Napolitani, Enrico Date: 2008 Series: Journal of Vacuum Science and Technology. Part B., Volume 26, issue 1